Publication date: 15th December 2014
Metal semiconductor oxide materials are assumed to be candidates for photoelectrochemical (PEC) solar water-splitting applications due to their abundance, light absorption properties and stability in aqueous media. In order to identify materials with optimized properties thin film materials libraries, exhibiting combined thickness and compositional gradients, of mixed Ti-W-O and Fe-W-O oxides were synthesized by combinatorial reactive magnetron sputtering. The reactive co-sputter deposition was performed with confocally positioned cathodes, in a gas mixture of Ar/O2: 1/3, at an elevated substrate temperature of 400°C on 100 mm diameter platinized Si/SiO2 substrates. A measurement grid (4.5 mm x 4.5 mm) defines 342 measurement areas on each materials library. High-throughput measurements of compositional, structural and functional data on the materials libraries were performed by automated EDX, XRD, thickness and PEC measurements. The analysis of the obtained data enables to establish correlations between composition, crystallinity, morphology, thickness, and photocurrent density. Over 300 different samples in a compositional range between (Ti80W20)Ox and (Ti97W3)Ox were characterized for the Ti-W-O system. PEC measurements showed the maximum quantum efficiency of 37.5 % at λ = 350 nm and a maximum peak photocurrent density of 70.3 µA/cm2 at 94.4 at.% Ti, which is attributed to the distinct pyramidal crystallites-like morphology observed on this measurement region. For W-Fe-O systems more than 1000 different samples in the composition range between (Fe6W94)Ox and (Fe61W39)Ox were examined, wherein two photocurrent density maxima were identified. Extensive phase analysis indicated the presence of a ternary phase Fe2O6W at the local maxima, while the W5O14 phase demonstrated the maximum quantum efficiency of 45 % at λ = 300 nm and a highest photocurrent density values of 65 µA/cm² at 15.2 at.% Fe.
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