PVD of thin-film solid-state electrolytes: a study on the lithium rich oxychloride antiperovskite
Nicolas Osenciat a, Abdessalem Aribia a, Moritz Futscher a, André Müller a, Kumar Yalamanchili b, Helmut Rudigier b, Yaroslav Romanyuk a
a EMPA Swiss Federal Laboratories for Materials Science and Technology, Ueberlandstrasse, 129, Dübendorf, Switzerland
b Oerlikon Surface Solutions AG, Churerstrasse, 120, Freienbach, Switzerland
Materials for Sustainable Development Conference (MATSUS)
Proceedings of Materials for Sustainable Development Conference (MAT-SUS) (NFM22)
#BATTERIES - Solid State Batteries: Advances and challenges on materials, processing and characterization
Barcelona, Spain, 2022 October 24th - 28th
Organizers: Alex Morata, Albert Tarancón and Ainara Aguadero
Contributed talk, Nicolas Osenciat, presentation 182
DOI: https://doi.org/10.29363/nanoge.nfm.2022.182
Publication date: 11th July 2022

The solid-state electrolyte field knows a hard competition to provide an ideal composition which needs to fulfill numerous criteria such as, high Li+ ionic conductivity, low electronic conductivity, and a high level of mechanical, chemical, electrochemical and air stability as well as interface stability against active electrode materials. Several compositions and chemistries have been investigated, including: oxides, sulfides, halides, polymers; each of them getting their own strengths and weaknesses.[1]

Dense thin-film solid–state electrolyte separator are interesting to offer (a) a model system to investigate interfaces, and more importantly, (b) a promising pathway to increase the energy density of solid-state cells. The reference of thin-film solid-state electrolyte, for a while, is the lithium phosphate oxynitride LiPON, due to its easy way of deposition/synthesis via reactive RF-Magnetron sputtering. However, LiPON has a ceiling ionic conductivity of ~10-6 S.cm-1.[2]

For a decade, the new family of Lithium Rich Antiperovskite (LiRAP) Li3-xOHxHal (Hal = Br,Cl) has been investigated and exhibits low raw material costs, low temperature of synthesis and a bulk ionic conductivity of ~10-3 S.cm-1.[3][4] In addition, previous studies report the possibility to use PVD method to obtain thin layers of the Li3OCl composition with an acceptable Li+, and electronic conductivity.[5][6]

Here, we explore different ways to synthesize thin layers of the Li3OCl solid-state electrolyte by using RF-Magnetron Sputtering or e-Beam with a post annealing treatment. We will presents the structural, chemical and physical characterization, for LiRAP films prepared on glass and platinum coated sapphire substrates, via grazing incident x-ray diffraction, scanning electron microscopy, Fourier-transform infrared spectroscopy, impedance spectroscopy and chronoamperometry. These findings might accelerate the development of thin film electrolyte as a potential pathway to further increase the energy density of solid-state cells.

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