Proceedings of nanoGe Fall Meeting19 (NFM19)
DOI: https://doi.org/10.29363/nanoge.nfm.2019.279
Publication date: 18th July 2019
Semiconducting metal oxide thin films are candidates for photoelectrochemical (PEC) solar water-splitting applications due to their abundance, light absorption properties and stability in aqueous media. To identify materials with optimized properties, thin-film materials libraries, exhibiting combined thickness and compositional gradients, were synthesized by combinatorial reactive co-sputtering from elemental targets on platinized 100 mm diameter wafers in several complex multinary oxide systems: Fe-W-Ti-O, Fe-Cr-Al-O, Cu-Si-Ti-O, V-X-O, and Bi-V-X-O. The libraries can be heat-treated in oxygen-containing atmosphere for further crystallization and oxidation. High-throughput characterization of the samples contained in these libraries (342 measurement areas on each library) comprises EDX and XPS for composition, XRD for crystal structure, SEM and AFM for surface morphology, the use of high-throughput test stands for electrical and optical properties (color, transmission), and an optical scanning droplet cells for the elucidation of photoelectrochemical properties including potential-dependent photocurrent, IPCE values, photocurrent spectra, Tauc plots etc.. The analysis of the obtained data enables to establish correlations between composition, crystallinity, morphology, thickness, and photocurrent density in functional phase diagrams. Several promising compositions were identified and further investigated. Finally, we demonstrate the combinatorial glancing angle sputter deposition (GLAD) approach for the fabrication of thin film materials libraries consisting of columnar nanostructures.
Financial support from the DFG in the framework of the SPP1613 is acknowledged.
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