Proceedings of nanoGe Fall Meeting19 (NFM19)
DOI: https://doi.org/10.29363/nanoge.nfm.2019.211
Publication date: 18th July 2019
For many decades metrology tasks have successfully been performed, but subsequently and without precise correlation to other metrology methods. Now that subjects to metrology are getting smaller and smaller many metrology systems come to their limit. This is not new. But what is new is that modelling at the same time is usually based on microscopic cells and small amounts of similar cells where at the same time metrology fails to support these small cells with solid data from different prospective. One reason is that metrology is bridging different scales. It might describe the subject`s behavior on a macroscopic scale or a microscopic scale. Sometimes it does both but the values diverge by an order of magnitude.
To create a digital twin there is a strong need to merge high resolution metrology data from diverse sources and with different magnitude of scales included. This is an easy claim but not that easy to realize.
The author shows how to integrate some major prerequisites that are a must for successful correlated characterization into a line that is build up. It is discussed what type of practical limitations have to be faced when trying to set the path. A typical error using multi scaled metrology process is that a large depiction helps to create an overview and based on that it is determined where to have a closer look. All deviation from regular information embedded into height, texture, mechanical properties etc. can only be judged at the specific scale that is chosen for the depiction. So zooming might reveal useful information but there is no hint on larger scale. What can be done is to have a closer look to detect a possible origin for property mismatch using different metrology tools. That is one of the strength of correlated characterization. How to make this happen if no visible markers are present or if metrology subjects are impossible to reveal using standard microscopes is one more subject to this talk.
An outlook of where all this might lead to is also included. This is definitely not a forecast but a vision.
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