Proceedings of nanoGe Fall Meeting 2018 (NFM18)
DOI: https://doi.org/10.29363/nanoge.nfm.2018.046
Publication date: 6th July 2018
Semiconducting metal oxide thin films are promising candidates for photoelectrochemical (PEC) solar water-splitting applications due to their abundance, light absorption properties and stability in aqueous media. To identify materials with optimized properties, thin-film materials libraries, exhibiting combined thickness and compositional gradients, were synthesized by combinatorial reactive co-sputtering from elemental targets on platinized 100 mm diameter wafers in several complex multinary oxide systems: Fe-W-Ti-O, Fe-Cr-Al-O, Cu-Si-Ti-O, V-X-O, and Bi-V-X-O. High-throughput measurements of compositional, structural and functional data on the materials libraries were performed by automated thickness measurements, energy-dispersive x-ray analysis (EDX), X-ray diffraction (XRD) and PEC analyses using an optical scanning droplet cell in 342 measurement areas on each of the materials libraries. Furthermore, the microstructure of selected thin films was characterized by electron and atomic force microscopy. The analysis of the obtained data enables to establish correlations between composition, crystallinity, morphology, thickness, and photocurrent density. Several promising compositions were identified using the combinatorial approach. Furthermore, we demonstrate the combinatorial glancing angle sputter deposition (GLAD) approach for the fabrication of thin film materials libraries consisting of columnar nanostructures.
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