Proceedings of Asia-Pacific International Conference on Perovskite, Organic Photovoltaics and Optoelectronics (IPEROP23)
DOI: https://doi.org/10.29363/nanoge.iperop.2023.085
Publication date: 21st November 2022
In this industrial talk we present LayTec's InspiRe metrology system for in-situ monitoring perovskite formation processes. This system allows to monitor the formation in real-time by means of spectral reflectance measurements. The methodology can be applied for obtaining spectral "fingerprints" during wet-chemical processes such as spin-coating or slot-die-coating as well as during annealing and physical vapor deposition. In this talk, we also show first examples of real time growth rate and film thickness monitoring applied during perovskite evaporation. Here, growth rate and thickness values are obtained by fitting the reflectance signal based on optical models. Finally, we will give an outlook on complementary metrology methods like spectral and time-resolved photoluminescence.
Acknowledgements:
We gratefully acknowledge our cooperation partners at HySprint / HZB (groups of E. Unger and S. Albrecht)
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