Publication date: 28th June 2024
Flow sensors are crucial in numerous bioelectronics applications, ranging from drug delivery and tracking biofluids like sweat to monitoring cell cultures and more. However, their development is often hindered by complex microfabrication processes, which limit rapid prototyping and cost-effective production for biomedical uses. Additionally, the performance metrics of these sensors under unified biological conditions remain unexplored. In this study, we introduce a versatile and scalable microfabrication technique using a femtosecond laser, achieving ultra-low dimension flow sensors. We systematically evaluated the flow sensing performance across three types of working mechanisms: thermoresistive, piezoresistive, and differential pressure-based sensors, all sharing identical material and resistive geometrical configurations. This study not only benchmarks the technological performance but also provides insights into the device properties essential for high-performance flow sensors. With simplified fabrication processes and direct biological system interfaces, these sensors show great promise for various bioelectronics applications, including blood flow monitoring and controlled drug delivery systems.
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